Conductivity Measurements of Semiconductors by Microwave Transmission Technique
- 1 December 1971
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 42 (12) , 1793-1796
- https://doi.org/10.1063/1.1685008
Abstract
A simple, quick, contactless, and accurate method for the measurement of electrical conductivity of a semiconductor slab is presented in this paper. The method is based on the study of transmission of circularly polarized TE11 mode of microwave propagation in circular waveguide. Conductivity of n‐type germanium and silicon samples and its temperature variation in the range 293–140 K have been successfully studied.Keywords
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