Departure from a stableSiH3phase on Si(111)

Abstract
A combined ultraviolet-photoemission- (UPS) and Auger-electron-spectroscopy investigation on the interaction of atomic hydrogen with the Si(111) surface shows that for high H exposures [> 103 L (L = 106Torr sec)] coadsorbed oxygen impurities build up at substrate temperatures below 200°C. The oxygen contamination gives rise to a UPS spectrum which is virtually identical with the spectra so far attributed to a stable (up to 700°C) SiH3 phase under similar experimental conditions.