Some properties of evaporated amorphous silicon made with atomic hydrogen
- 1 December 1978
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 49 (12) , 6192-6193
- https://doi.org/10.1063/1.324521
Abstract
We describe measurements on a‐Si films made by adding atomic hydrogen during evaporation of silicon. The material has conductivity comparable to that formed by silane decomposition and is also photoconducting. The photocurrent in these initial experiments is smaller than in the bes silane‐produced films.This publication has 7 references indexed in Scilit:
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