Resolution limits in the surface scanning electron microscope

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Abstract
SUMMARY: An approximate theory is developed for estimating the limiting topographical resolution of the scanning electron microscope operating under certain idealized conditions. Limitations imposed by electron beam shot noise and electron diffusion effects within the specimen are considered for the case of an instrument incorporating a field emission source and in which there is ideal collection of the secondary electron signal. The specimen is assumed to be an homogeneous, isotropic solid with the beam incident normally to its surface.It is estimated that, under these ideal conditions, the limiting resolution for a metallic specimen lies in the region of 1 nm. The possibilities of realizing a resolution of this order in a practical instrument are discussed.

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