Direct Bonding of LiTaO3 Single Crystals
- 1 November 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (11A) , L1542
- https://doi.org/10.1143/jjap.33.l1542
Abstract
A new fabrication method for combining lithium tantalate single crystals by direct bonding without using bonding agents has been developed. The bonded interface was found to be very uniform, and bonding on an atomic scale was achieved in spite of a relatively low heat-treatment temperature of 350°C. This method is very promising for realizing new stacked structures and new fabrication processes for piezoelectric and electrooptic devices, such for a layer of ferroelectric single crystal on insulator or semiconductor.Keywords
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