Recent Progress in Microcrystalline Semiconductor Thin Films
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 50 references indexed in Scilit:
- The one phonon Raman spectrum in microcrystalline siliconPublished by Elsevier ,2002
- Substrate dependence of initial growth of microcrystalline silicon in plasma-enhanced chemical vapor depositionJournal of Applied Physics, 1996
- Bond Selectivity in Silicon Film GrowthScience, 1992
- In situ characterization of the growing a-Si:H surface by IR spectroscopyJournal of Non-Crystalline Solids, 1991
- Effects of hydrogen atoms on the network structure of hydrogenated amorphous and microcrystalline silicon thin filmsApplied Physics Letters, 1990
- Proton nuclear magnetic resonance study on hydrogen incorporation in amorphous-microcrystalline mixed-phase hydrogenated siliconJournal of Applied Physics, 1984
- Formation kinetics and control of microcrystallite in μc-Si:H from glow discharge plasmaJournal of Non-Crystalline Solids, 1983
- Raman scattering from hydrogenated microcrystalline and amorphous siliconJournal of Physics C: Solid State Physics, 1982
- (Invited) Optical, Electrical and Structural Properties of Plasma-Deposited Amorphous SiliconJapanese Journal of Applied Physics, 1981
- Substitutional doping of amorphous siliconSolid State Communications, 1975