Velocity-Distribution Functions of Sputtered Atoms Caused by Insufficiently Developed Collision-Cascades

1 August 1986

journal article
Published by IOP Publishing in Japanese Journal of Applied Physics

Vol. 25 (8R)
https://doi.org/10.1143/jjap.25.1256

Abstract

Velocity-distribution functions of sputtered iron atoms by argon-ion bombardment at oblique incidence, measured by laser fluorescence spectroscopy, were found to deviate from the Thompson formula at forward ejection angles relative to the incident ions. The effect was identified as being due to, and quantitatively evaluated by, contributions from insufficiently developed collision-cascades.

Keywords

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