Self-consistent particle modelling of dc magnetron discharges of an O2/Ar mixture

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Abstract
The characteristics of planar magnetron discharges of an O2/Ar mixture are clarified using the particle-in-cell/Monte Carlo method. The simulation is carried out for axisymmetrical magnetic fields under the condition of constant total gas pressure of 5 mTorr and constant applied voltage of 500 V. The fraction of oxygen partial pressure, p_O2, is changed from 30 % to 70 %. In the case of pO2 = 50% the order of the magnitude of number densities is ne>nAr+>nO2+>nO+>>nO-. As pO2 increases, the electrical field becomes weaker, the cathode sheath becomes thicker, nAr+ decreases, nO2+ and nO+ first increase and then decrease, and the total flux of positive ions onto the cathode decreases. The effect of the arrangement of a magnet system on the total ion flux is also examined.