Direct Patterning of the Current Confinement Structure for p-Type Column-III Nitrides by Low-Energy Electron Beam Irradiation Treatment
- 1 February 1995
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 34 (2S) , 1190-1193
- https://doi.org/10.1143/jjap.34.1190
Abstract
Partial low-energy electron beam irradiation (LEEBI) treatment was used to fabricate UV/blue light-emitting devices based on column-III nitrides having a directly patterned current confinement structure. The newly developed devices show very low leakage reverse current, stable operation at high pulsed current injection, and strong and narrow violet emission at room temperature.Keywords
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