Capacitance Based Tunable Micromechanical Resonators
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 438-441
- https://doi.org/10.1109/sensor.1995.717233
Abstract
We present actuators which tune the resonant frequency of micromechanical oscillators. Experimental results show resonant oscillations from 7.7% to 146% of the original resonant frequency. Numerical results substantiate these results. Two failure modes have been identified which limitKeywords
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