Velocity dependence of ionization probability of BE, CU, AG, W, PB and SN atoms sputtered by 5.5 KEV ar+ions
- 1 April 1990
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects and Defects in Solids
- Vol. 113 (4) , 263-268
- https://doi.org/10.1080/10420159008213070
Abstract
The energy distributions of both ions and neutral atoms sputtered during ion bombardment of a few polycrystalline metals have been measured. The absolute values of the ionization probability P + as a function of the emitted particle velocity v were obtained. The ionization probability for Be, Cu, Ag and W targets is found to depend exponentially on the particle velocity in accordance with the electron tunneling model. In the case of Pb and Sn the ionization probability shows strong deviation from an exponential dependence at high emission energies.Keywords
This publication has 10 references indexed in Scilit:
- Emission energy dependence of ionization probabilities in secondary ion emission from oxygen covered Ta, Nb and Cu surfacesSurface Science, 1988
- Mechanisms of atomic ion emission during sputteringNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Velocity dependence of secondary-ion emissionPhysical Review B, 1984
- Theory of charge transfer for desorption of ions from surfacesSurface Science, 1983
- Ionization of low-energy atoms ejected from ion-bombarded solid surfacesPhysical Review B, 1982
- Secondary-ion emission from clean and oxygen-covered beryllium surfaces: II. Energy dependenceSurface Science, 1980
- On the energy distribution and angular distribution of sputtered particlesRadiation Effects, 1980
- Методы решения некорректных экстремальных задачBanach Center Publications, 1978
- II. The energy spectrum of ejected atoms during the high energy sputtering of goldPhilosophical Magazine, 1968
- Cross-sections of Molecules for Ionization by ElectronsJournal of the American Chemical Society, 1956