Lateral resolution of microscopic X-ray photoelectron spectroscopy in detecting striped patterns
- 1 July 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
- Vol. 332 (1-2) , 181-187
- https://doi.org/10.1016/0168-9002(93)90757-9
Abstract
No abstract availableThis publication has 15 references indexed in Scilit:
- Scanning photoemission microscopy with synchrotron radiationNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1992
- Grazing incidence optics for soft x-ray microscopyReview of Scientific Instruments, 1992
- Microscopic X-ray Photoelectron Spectroscopy Using a Wolter Type X-ray MirrorJapanese Journal of Applied Physics, 1991
- High-resolution x-ray microscopy using an undulator source, photoelectron studies with MAXIMUMJournal of Vacuum Science & Technology A, 1991
- Images of a microelectronic device with the X1‐SPEM, a first generation scanning photoemission microscope at the National Synchrotron Light SourceJournal of Vacuum Science & Technology A, 1991
- Microscopic x-ray photoelectron spectroscopy using a focused soft x-ray beamJournal of Vacuum Science & Technology A, 1991
- Overview of soft-x-ray photoemission spectromicroscopyNuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 1990
- Soft x-ray monochromator with a varied-space plane grating for synchrotron radiation: design and evaluationApplied Optics, 1989
- Verallgemeinerte Schwarzschildsche Spiegelsysteme streifender Reflexion als Optiken für RöntgenstrahlenAnnalen der Physik, 1952
- Spiegelsysteme streifenden Einfalls als abbildende Optiken für RöntgenstrahlenAnnalen der Physik, 1952