Effects of an AlN nucleation layer on magnetron-sputtered indium nitride films
Open Access
- 1 May 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 213 (1) , 86-93
- https://doi.org/10.1016/0040-6090(92)90479-u
Abstract
No abstract availableKeywords
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