Monolithically integrated coplanar 75‐GHz silicon impatt oscillator

Abstract
Planar IMPATT diodes have been fabricated for W‐band operation on high‐resistivity silicon substrates. The active layers are grown by silicon molecular beam epitaxy. The diodes are monolithically integrated in a coplanar disc resonator. Good DC characteristics have been achieved. Oscillations have been detected at a frequency of 76 GHz with a continuous wave output power of about 1 mW.

This publication has 5 references indexed in Scilit: