Excimer laser annealed gold and silver ohmic contacts on+-GaAs
- 16 September 1986
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 97 (1) , K69-K72
- https://doi.org/10.1002/pssa.2210970148
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Pulsed UV Laser Processed Gold and Aluminum Ohmic Contacts on n+-GaAsPhysica Status Solidi (a), 1984
- Electron microscope studies of an alloyed Au/Ni/Au-Ge ohmic contact to GaAsJournal of Applied Physics, 1983
- Laser annealed ohmic contact to n+-GaAsCanadian Journal of Physics, 1983
- Reliability of pulsed electron-beam-alloyed AuGe/Pt ohmic contacts on GaAsApplied Physics Letters, 1981
- Q-switched ruby laser alloying of Ohmic contacts on gallium arsenide epilayersApplied Physics Letters, 1978
- Ohmic contacts for GaAs devicesSolid-State Electronics, 1967