Epitaxially Induced Stress in GaAs Layer on V-Grooved Si and GaAs Substrates

Abstract
Raman spectra from the (01̄1) face in GaAs epitaxial layers on both V-grooved (100)-Si and -GaAs substrates were observed. Peak- shifts in the transverse-optical (TO) modes at the edge of the V-groove were observed in hetero- and homo-epitaxial structures, respectively. Additional line broadening in the TO mode was only observed in the heteroepitaxial structure. The peak-shifts result from the epitaxially induced stress and the additional broadening was due to the fluctuation of the stress.