Oxygen Precipitation in Silicon: Numerical Models
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Oxide Micro‐Precipitates in As‐Grown CZ SiliconJournal of the Electrochemical Society, 1982
- Diffusion of oxygen in siliconJournal of Applied Physics, 1982
- Precipitation of oxygen in silicon: Some phenomena and a nucleation modelJournal of Applied Physics, 1981
- Oxygen precipitation in siliconJournal of Applied Physics, 1979
- Theory of diffusion-limited precipitationJournal of Physics and Chemistry of Solids, 1958