Electrical Properties of Ion Implanted Germanium
- 1 January 1971
- book chapter
- Published by Springer Nature
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
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- Low energy boron and phosphorus implants in silicon (a) electrical sheet measurementsRadiation Effects, 1970
- Low energy boron and phosphorus implants in silicon (b) doping profilesRadiation Effects, 1970
- Effect of Ion Bombardment on the Electrical Conductivity of GermaniumPhysical Review B, 1968
- Ion implantation of silicon and germanium at room temperature. Analysis by means of 1.0-MeV helium ion scatteringCanadian Journal of Physics, 1968
- Channeling of medium-mass ions through siliconCanadian Journal of Physics, 1968
- Ion implantation in semiconductors—Part I: Range distribution theory and experimentsProceedings of the IEEE, 1968
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- The fabrication of high quality silicon junction detectors by low energy ion implantationThe European Physical Journal A, 1967
- Magnetoconductive correction factors for an isotropic Hall plate with point sourcesSolid-State Electronics, 1966