Investigation of in-situ sputtered a-Si(H) by AES
- 30 September 1983
- journal article
- Published by Elsevier in Solar Energy Materials
- Vol. 9 (2) , 183-187
- https://doi.org/10.1016/0165-1633(83)90041-2
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Photoemission Study of Oxygen Adsorbed on Sputtered a‐Si(H) and a‐SiPhysica Status Solidi (b), 1982
- Transport properties of a-Si: H alloys prepared by r.f. sputteringPhilosophical Magazine Part B, 1982
- Electronic-structure studies of hydrogenated amorphous silicon filmsPhysical Review B, 1981
- A secondary electron emission correction for quantitative auger yield measurementsSurface Science, 1980
- On the role of hydrogen in a-SiJournal of Non-Crystalline Solids, 1980
- Simultaneous auger surface spectroscopy study of sputtered a-Si, a-Si:H and monocrystalline Si (111) with and without H chemisorptionJournal of Non-Crystalline Solids, 1980
- The L1L23V Coster-Kronig transition in hydrogenated amorphous siliconSurface Science, 1979
- Photoelectron Spectra of Hydrogenated Amorphous SiliconPhysical Review Letters, 1977
- Hydrogen adsorption and surface structures of siliconSurface Science, 1974