Effects of boron doping on the surface morphology and structural imperfections of diamond films
- 1 May 1992
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 1 (7) , 828-835
- https://doi.org/10.1016/0925-9635(92)90109-2
Abstract
No abstract availableKeywords
This publication has 27 references indexed in Scilit:
- Material and electrical characterization of polycrystalline boron-doped diamond films grown by microwave plasma chemical vapor depositionJournal of Applied Physics, 1991
- Dislocations, twins, and grain boundaries in CVD diamond thin films: Atomic structure and propertiesJournal of Materials Research, 1990
- Properties of Boron-Doped Epitaxial Diamond FilmsJapanese Journal of Applied Physics, 1990
- Electron microscopy of vapor phase deposited diamondJournal of Materials Research, 1990
- Boron doping of diamond thin filmsApplied Physics Letters, 1989
- Structural imperfections in CVD diamond filmsJournal of Materials Research, 1989
- Characterization of Boron-Doped Diamond FilmJapanese Journal of Applied Physics, 1989
- Graphite formation in diamond film depositionJournal of Vacuum Science & Technology A, 1989
- Characterization of diamond thin films: Diamond phase identification, surface morphology, and defect structuresJournal of Materials Research, 1989
- Characterization of conducting diamond filmsVacuum, 1986