Effects of Reactive Sputtering Parameters on the Growth and Properties of Acoustooptic ZnO Films
- 1 January 1992
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Growth and Erosion of Thin Solid FilmsScience, 1990
- Analytical and numerical modeling of columnar evolution in thin filmsJournal of Vacuum Science & Technology A, 1988
- Optical properties of nonstoichiometric zinc oxide films deposited by bias sputteringJournal of Vacuum Science & Technology A, 1986
- Zinc Oxide Films for Acoustoelectric Device ApplicationsIEEE Transactions on Sonics and Ultrasonics, 1985
- Aspects for the design of sputtering systemsVacuum, 1983
- High Rate Thick Film GrowthAnnual Review of Materials Science, 1977
- Theory of interdigital couplers on nonpiezoelectric substratesJournal of Applied Physics, 1973
- dc triode sputtered zinc oxide surface elastic wave transducersJournal of Applied Physics, 1973