Silicon Nitride Oxidation Based on Oxynitride Interlayers with Graded Stoichiometry
- 1 November 1996
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 79 (11) , 2993-2996
- https://doi.org/10.1111/j.1151-2916.1996.tb08742.x
Abstract
No abstract availableKeywords
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