Role of Si2N2O in the Passive Oxidation of Chemically‐Vapor‐Deposited Si3N4
- 1 November 1992
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 75 (11) , 2995-3000
- https://doi.org/10.1111/j.1151-2916.1992.tb04377.x
Abstract
No abstract availableKeywords
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