Polarization mode filter in GaAs-AlAs superlattice fabricated by SiO/sub 2/ cap disordering

Abstract
Novel TE-mode and TM-mode filters in GaAs-AlAs superlattice are proposed and fabricated by SiO/sub 2/ cap disordering. The structure consists of mode-selective channel waveguides with bending regions. Functions of mode filters are confirmed by observing near-field patterns, yielding an extinction ratio of 14 dB at 1.15 mu m wavelength.