Silicides
- 1 January 1985
- book chapter
- Published by Elsevier
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
- Thermal Oxidation of Transition Metal Silicides on Si: SummaryJournal of the Electrochemical Society, 1984
- Interface effects in the formation of silicon oxide on metal silicide layers over silicon substratesJournal of Applied Physics, 1983
- Thermal oxidation of cobalt disilicideApplied Physics A, 1982
- Oxidation of tantalum disilicide/polycrystalline silicon structures in dry O2Journal of Applied Physics, 1982
- Oxidation of titanium disilicide on polycrystalline siliconJournal of Electronic Materials, 1982
- Thermal oxidation of nickel disilicideApplied Physics Letters, 1982
- Oxidation mechanisms in TiSi2 films on single silicon substratesApplied Physics Letters, 1980
- Oxidation of tantalum disilicide on polycrystalline siliconJournal of Applied Physics, 1980
- Characterization of Thin Film Molybdenum Silicide OxideJournal of the Electrochemical Society, 1980
- General Relationship for the Thermal Oxidation of SiliconJournal of Applied Physics, 1965