Crystallization of composite coatings of AIN-TiN, TiN-AIN-Ti and TiN-Ti3AI-Ti from the reactive pulse plasma by the use of a hot two-sectional electrode
- 1 March 1985
- journal article
- Published by Springer Nature in Journal of Materials Science Letters
- Vol. 4 (3) , 251-254
- https://doi.org/10.1007/bf00719782
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Structural and electrical properties of AlN-Au composite filmsThin Solid Films, 1981
- Selective Studies of Chemical Vapor‐Deposited Aluminum Nitride‐Silicon Nitride Mixture FilmsJournal of the Electrochemical Society, 1978