Growth of cubic boron nitride and boron-carbon-nitrogen coatings using N-trimethylborazine in an electron cyclotron resonance plasma process
- 31 March 1993
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 2 (2-4) , 201-206
- https://doi.org/10.1016/0925-9635(93)90053-5
Abstract
No abstract availableKeywords
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