Preparation of crystalline TiC thin films grown by pulsed Nd:YAG laser deposition using Ti target in methane gas
- 30 April 2002
- journal article
- Published by Elsevier in Materials Characterization
- Vol. 48 (2-3) , 221-228
- https://doi.org/10.1016/s1044-5803(02)00243-7
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Low resistivity ohmic titanium carbide contacts to n- and p-type 4H-silicon carbideSolid-State Electronics, 2000
- Crystalline silicon nitride thin films grown by pulsed YAG laser depositionNanostructured Materials, 1999
- Chromium Carbide Thin Films Synthesized by Pulsed Nd:YAG Laser DepositionJapanese Journal of Applied Physics, 1999
- Elastic properties of sub-stoichiometric titanium carbidesSolid State Communications, 1999
- TiC coatings prepared by pulsed laser deposition and magnetron sputteringSurface and Coatings Technology, 1997
- Growth of TiC films by thermal laser-assisted chemical vapour depositionApplied Surface Science, 1997
- Effects of r.f. bias on cubic BN film synthesis by pulsed Nd: YAG laser depositionThin Solid Films, 1996
- Pyrolytic laser-based chemical vapour deposition of TIC coatingsThin Solid Films, 1995
- Laser reactive ablation deposition of titanium carbide filmsThin Solid Films, 1995
- Tribological behavior of TiC thin films grown by pulsed laser deposition (PLD)Surface and Coatings Technology, 1993