Crystalline silicon nitride thin films grown by pulsed YAG laser deposition
- 31 December 1999
- journal article
- Published by Elsevier in Nanostructured Materials
- Vol. 12 (1-4) , 391-394
- https://doi.org/10.1016/s0965-9773(99)00142-7
Abstract
No abstract availableKeywords
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