Properties of reactively d.c.-magnetron-sputtered A1N thin films
- 1 May 1993
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 228 (1-2) , 215-217
- https://doi.org/10.1016/0040-6090(93)90601-k
Abstract
No abstract availableKeywords
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