Plasma-assisted reactive evaporation of aluminium nitride films
- 16 March 1987
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 100 (1) , 207-211
- https://doi.org/10.1002/pssa.2211000123
Abstract
No abstract availableKeywords
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- Processes of the activated reactive evaporation type and their tribological applicationsThin Solid Films, 1983
- Penetration and energy deposition of electrons in thick targetsJournal of Applied Physics, 1974
- VACUUM DEPOSITION OF AlN ACOUSTIC TRANSDUCERSApplied Physics Letters, 1968