Surface-related phenomena in the direct bonding of silicon and fused-silica wafer pairs
- 31 December 1995
- journal article
- Published by Elsevier in Philips Journal of Research
- Vol. 49 (1-2) , 47-63
- https://doi.org/10.1016/0165-5817(95)82003-5
Abstract
No abstract availableKeywords
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