Study of d.c. multipole discharges in silane-diborane and silane-phosphine mixtures
- 14 November 1984
- journal article
- Published by Elsevier in International Journal of Mass Spectrometry and Ion Processes
- Vol. 62 (1) , 89-98
- https://doi.org/10.1016/0168-1176(84)80071-3
Abstract
No abstract availableKeywords
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