As-grown Y-Ba-Cu-O thin films by reactive coevaporation with oxygen plasma cooling
- 15 October 1989
- journal article
- letter
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (8) , 3907-3909
- https://doi.org/10.1063/1.344033
Abstract
We have developed a new fabrication process of as‐grown Y‐Ba‐Cu‐O thin films using a reactive coevaporation method specially with the rf‐plasma cooling in the low oxygen pressure of 0.4 mTorr. By this O2 plasma cooling process, the transition temperature Tc is improved from 40 to 81 K for the film with a thickness of 1000 Å. The x‐ray diffraction analysis shows that the activated oxygen species generated by the rf plasma make Y‐Ba‐Cu‐O films oxidize sufficiently even in the low pressure of oxygen. In addition, we have studied the thickness dependence of Tc for as‐grown films with various thicknesses of 60–2000 Å.This publication has 14 references indexed in Scilit:
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