A Chemical thinning technique for transmission electron microscopy cross-sectional samples
- 1 September 1983
- journal article
- Published by Springer Nature in Journal of Electronic Materials
- Vol. 12 (5) , 837-844
- https://doi.org/10.1007/bf02655297
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Transmission electron microscopy and Rutherford backscattering studies of different damage structures in P+ implanted SiJournal of Applied Physics, 1980
- A new technique for observing the amorphous to crystalline transformation in thin surface layers on silicon wafersJournal of Applied Physics, 1980
- Transmission electron microscopy of cross sections of large scale integrated circuitsIEEE Transactions on Electron Devices, 1976
- Cross-sectional specimens for transmission electron microscopyJournal of Applied Physics, 1974