Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials
- 12 January 2008
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 85 (5-6) , 1147-1151
- https://doi.org/10.1016/j.mee.2008.01.002
Abstract
No abstract availableKeywords
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