Combined effects of thermophoresis and electrophoresis on particle deposition onto a wafer
- 1 August 1998
- journal article
- Published by Elsevier in Journal of Aerosol Science
- Vol. 29 (7) , 811-825
- https://doi.org/10.1016/s0021-8502(97)10025-8
Abstract
No abstract availableKeywords
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