Comparative Study of the Metal Organic Chemical Vapor Deposition of β-CoGa Thin Films from Dialkylgallium Tetracarbonylcobaltate Single-Source Precursors
- 1 January 1996
- journal article
- research article
- Published by American Chemical Society (ACS) in Chemistry of Materials
- Vol. 8 (2) , 497-508
- https://doi.org/10.1021/cm9504044
Abstract
No abstract availableKeywords
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