Investigations on the correlation between growth rate and gate oxide integrity of Czochralski-grown silicon
- 1 May 1994
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 139 (1-2) , 37-46
- https://doi.org/10.1016/0022-0248(94)90026-4
Abstract
No abstract availableThis publication has 11 references indexed in Scilit:
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