Nitridation of titanium by multipulse excimer laser irradiation
- 1 December 1990
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 46 (1-4) , 365-370
- https://doi.org/10.1016/0169-4332(90)90171-u
Abstract
No abstract availableKeywords
This publication has 10 references indexed in Scilit:
- Synthesis of metallic and semiconductor nitrides by multipulse laser irradiation of solid samples in ambient gasesApplied Surface Science, 1989
- Nitriding of bulk titanium and thin titanium films in a NH3 low pressure plasmaApplied Surface Science, 1989
- Electrical transport, optical properties, and structure of TiN films synthesized by low-energy ion assisted depositionJournal of Applied Physics, 1988
- Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiationApplied Physics Letters, 1988
- Laser synthesis of metal silicidesApplied Physics A, 1988
- On the mechanism of surface compound formation by powerful microsecond pulsed TEA CO2laser irradiation in technical nitrogenJournal of Physics D: Applied Physics, 1985
- Ion-implanted, electron-beam annealed TiN films as diffusion barriers for Al on Si shallow junctionsJournal of Vacuum Science & Technology A, 1985
- Properties and microelectronic applications of thin films of refractory metal nitridesJournal of Vacuum Science & Technology A, 1985
- Barrier layers: Principles and applications in microelectronicsJournal of Vacuum Science & Technology A, 1984
- Simultaneous nuclear microanalysis of nitrogen and oxygen on siliconNuclear Instruments and Methods in Physics Research, 1982