Defect Distribution and Bonding Structure in High Band Gap a-Si1−xCx:H Films Deposited in H2 Dilution
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 12 references indexed in Scilit:
- The influence of hydrogen dilution on the optoelectronic and structural properties of hydrogenated amorphous silicon carbide filmsPhilosophical Magazine Part B, 1994
- A new modular multichamber plasma enhanced chemical vapor deposition systemApplied Surface Science, 1993
- The electronic and atomic structure of hydrogenated amorphous Si—C alloysPhilosophical Magazine Part B, 1992
- Influence of hydrogen dilution on the optoelectronic properties of glow discharge amorphous silicon carbon alloysJournal of Applied Physics, 1992
- CORRELATION BETWEEN OPTICAL DEFECT DENSITY AND SPIN DENSITY IN AMORPHOUS SILICON CARBIDEModern Physics Letters B, 1991
- Electron spin resonance and photoacoustic spectroscopy of a-CSi:H and a-SiGe:H alloysThin Solid Films, 1990
- The structural, chemical and compositional nature of amorphous silicon carbide filmsPhilosophical Magazine Part B, 1990
- Guiding principle for preparing highly photosensitive Si-based amorphous alloysJournal of Non-Crystalline Solids, 1987
- Physics of Amorphous Silicon–Carbon AlloysPhysica Status Solidi (b), 1987
- Direct measurement of gap-state absorption in hydrogenated amorphous silicon by photothermal deflection spectroscopyPhysical Review B, 1982