Fabrication of a silicon-based superfluid oscillator
- 1 January 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 5 (3) , 180-186
- https://doi.org/10.1109/84.536624
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- The nucleation of vortices in superfluid4He: Answers and questionsJournal of Low Temperature Physics, 1993
- Fabrication of submicron apertures in thin membranes of silicon nitrideJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1993
- Principles of superfluid-helium gyroscopesPhysical Review B, 1992
- Josephson effect and quantum phase slippage in superfluidsPhysical Review Letters, 1988
- Search for an ac Josephson effect in superfluidusing a low-frequency acoustic resonatorPhysical Review B, 1987
- Silicon nitride single-layer x-ray maskJournal of Vacuum Science and Technology, 1982
- Superconducting tunable-diaphragm transducer for sensitive acceleration measurementsJournal of Applied Physics, 1976
- Thernial Expansivity and Relaxational Behavior of Amorphous Polymers at Low TemperaturesInternational Journal of Polymeric Materials and Polymeric Biomaterials, 1974
- A Water-Amine-Complexing Agent System for Etching SiliconJournal of the Electrochemical Society, 1967
- Considerations on the Flow of Superfluid HeliumReviews of Modern Physics, 1966