Structural characterization of epitaxial BaTiO3 thin films grown by sputter deposition on MgO(100)

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Abstract
Epitaxial thin films of BaTiO3 have been prepared using radio‐frequency magnetron sputter deposition on MgO(100) substrates. Various x‐ray‐diffraction techniques were employed to characterize the crystal structure of the films. The films were fully tetragonal and consisted of c domains. Their tetragonality has been shown to be 1.013, which is almost the same as the bulk value of BaTiO3. However, the cross‐sectional transmission electron microscopic micrograph showed that a very small amount of a domains coexists forming 90° domain boundaries in the matrix of c domains. In spite of the negligible strain caused by the phase transformation, it seems to be inevitable to form a certain small amount of a domains in the BaTiO3 film on MgO system.