Characterisation of rough silicon surfaces using spectroscopic ellipsometry, reflectance, scanning electron microscopy and scattering measurements
- 1 January 1990
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 5 (2) , 295-299
- https://doi.org/10.1016/0921-5107(90)90072-j
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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