Electronic states at the interface between thin films of ZnS and crystalline p-silicon

Abstract
Thin films of zinc sulfide have been evaporated onto pp+ silicon substrates and metal‐insulator‐semiconductor diodes fabricated. Capacitance‐voltage characteristics have been analyzed qualitatively and quantitative measurement of the density of interface states has been made using the conductance technique developed by Nicollian and Goetzberger [Bell Syst. Tech. J. 4 6, 1055 (1967)]. Similarities between this interface and that between sputtered zinc sulfide are noted. A model is developed to explain the high densities of interface states observed (≥1012 cm2 eV1) and the suitability of these films for use in electroluminescent devices is discussed.