Abstract
C-V and G-V measurements have been carried out on metal/semi-insulating polycrystalline silicon (SIPOS)/silicon structures. From the results a density-of-states curve for the SIPOS/silicon interface was constructed. The density of interface states can be as high as ∼1×1013 cm−2 eV−1, but falling to ∼3×1011 cm−2 eV−1 at about 0.1 eV from midgap.