SU8 resist for low-cost X-ray patterning of high-resolution, high-aspect-ratio MEMS
- 1 January 2002
- journal article
- Published by Elsevier in Microelectronics Journal
- Vol. 33 (1-2) , 101-105
- https://doi.org/10.1016/s0026-2692(01)00109-4
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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