Total dose effects on Microelectromechanical Systems (MEMS): accelerometers
- 1 December 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Nuclear Science
- Vol. 43 (6) , 3127-3132
- https://doi.org/10.1109/23.556915
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Modelling of the mechanical behaviour of a differential capacitor acceleration sensorSensors and Actuators A: Physical, 1995
- A surface micromachined silicon accelerometer with on-chip detection circuitrySensors and Actuators A: Physical, 1994
- Important Considerations for SEM Total Dose TestingIEEE Transactions on Nuclear Science, 1977
- Sem irradiation for hardness assurance screening and process definitionIEEE Transactions on Nuclear Science, 1974