An integrated gas sensor technology using surface micro-machining
- 13 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- No. 10846999,p. 543-546
- https://doi.org/10.1109/memsys.2001.906599
Abstract
We report the silicon based integrated gas sensor technology using surface micro-machined micro-hotplate. Using this technology, an integrated gas sensor sensitive to 1 ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas sensor array application.Keywords
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