A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

This publication has 9 references indexed in Scilit:

• Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Optimized Temperature Pulse Sequences For The Enhancement Of Chemically-specific Response Patterns From Micro-hotplate Gas Sensors
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Thermal analysis and design of a micro-hotplate for integrated gas-sensor applications
  Sensors and Actuators A: Physical, 1996
• Characterization of porous tin oxide thin films and their application to microsensor fabrication
  Sensors and Actuators B: Chemical, 1995
• A new SnO2 low temperature deposition technique for integrated gas sensors
  Sensors and Actuators B: Chemical, 1993
• Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
  IEEE Electron Device Letters, 1993
• Wet etching of thin SnO2 films
  Sensors and Actuators A: Physical, 1990
• Micro-gas sensor for monitoring anesthetic agents
  Sensors and Actuators B: Chemical, 1990
• Plasma etching of SnO2 films on silicon substrates
  Thin Solid Films, 1980